XBS Triple Filter Quadrupoles configured for multiple source monitoring in MBE deposition applications. The custom configured ioniser provides for high stability, high senstivity monitoring of oxides and metals from both k-cell and e-gun sources.
- MBE monitoring and control.
- Molecular Beam Studies.
- Multiple beam source analysis.
- High Performance RGA.
- Desorption / Outgassing studies / Bakeout cycles.
- Chamber / Process gas Contaminants.
Hiden XBS mass spectrometers for high precision scientific, process applications and MBE analysis, featuring:
- High Sensitivity, Enhanced detection from 100% to 5ppb, mass range to 510 amu.
- Enhanced long-term Stability (less than ±0.5% height variation over 24 h).
- Crossbeam ion source, beam acceptance through +/- 35° to transverse axis.
- Ion source control for soft ionisation and appearance potential mass spectrometry.
- Enhanced sensitivity for high mass transmission, Automatic mass scale alignment.
- 2mm beam acceptance aperture – configured to specific user application.
- Enhanced contamination resistance via the RF-only pre-filter stage.
- Integral UHV compatible water-cooled shroud.
- Detection limits down to 30 ions / s in molecular beam studies.
- Monitor growth rates of 1Å / min and lower.
- Windows™ based MASsoft control via RS232, RS485 or Ethernet LAN.
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