E-Beam Nanolithography Training at the University of Toronto

Follow this link to register: http://www.ecti.utoronto.ca/education/ebeamtraining.htm

E-Beam Nanolithography Training

Nanotechnology Training: Learn How to Write at the Nanometre Scale

Electron Beam Lithography (EBL) is a technique used for the patterning of optical masks for semiconductor integrated electronic circuits as well as for writing high-resolution patterns on substrates. It is one of the key nanofabrication technologies for device manufacturing for a wide range of technological and research applications. This training session will provide an introduction to Electron Beam Nanolithography, including the following topics:

  • Description of the electro-optical, mechanical and electronic components of the E-Beam tool
  • Discussion of electron-solid interaction concepts such as forward scattering, backward scattering, proximity effects, and correction techniques
  • Demonstration of sample and data processing including fabrication protocols for E-Beam lithography exposure
  • Introduction to various E-Beam lithography software packages
  • ISO 5 (Class 100) cleanroom practice and lab demonstration

This 9-hour training session, which involves 6 hours of classroom time and 3 hours of hands-on experience and lab demonstration, is required preparation for those who wish to use the University of Toronto Electron Beam Nanolithography Facility.

By the end of the training session, participants will have designed and written a nano-device.

Handouts will be provided.

Target Audience: Graduate students, upper year undergrads, and others in academia or industry with a degree in engineering, physics, applied sciences, or life sciences.

Prerequisites: There are no prerequisites, although semiconductor microfabrication experience is helpful.

Schedule: Wednesday, April 21, April 28 and May 5 -- 1 to 3 p.m.

Location: Classroom sessions in the Bahen Building, 40 St. George St. Toronto, University of Toronto

Cost: $200 (academic); $400 (industry)

Instructor: Dr. Aju Jugessur

Full description of training session [PDF], including lecture outlines and recommended reading.

For more information about the training, please contact Aju Jugessur.


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