A state of the art secondary ion mass spectrometer for static and dynamic SIMS and SNMS applications.
- Integral energy filter for ion acceptance at 30° to the probe axis
- High transmission SIMS extraction ion optics
- High efficiency electron impact SNMS ionizer
- Triple mass filter
- Pulse ion counting detector
- Control electronics with Windows MASsoft PC software
- Raster control for imaging and depth profiling
Specification for MAXIM Analyser
- SIMS - 3x106 cps/nA for 27Al+ sputtered from Al target by 5 keV Ar+ ions
- SNMS - >80 cps/nA for 107Ag sputtered from Ag target by 5 keV Ar+ ions
MAXIM the most sensitive quadrupole SIMS analyser for the most sensitive elemental analysis technique.
- Mass range options: 300amu, 500amu or 1000amu
- Detector: Ion counting detector,
Positive and Negative ion detection, 107 cps
- Mass filter: Triple filter
- Pole diameter: 9mm
- Bakeout: 250°C
- Ion energy filter: 30° angular acceptance
- Ioniser: Electron bombardment, single filament for SNMS and RGA
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