EPIC Quadrupole mass spectrometers for UHV analysis of neutrals, radicals and ions

EPIC Quadrupole mass spectrometers for UHV analysis of neutrals, radicals and ions

Triple Filter Quadrupoles for Precision Gas Analysis and Scientific Applications.

- Neutrals, Radicals, Positive & Negative ions.
- Electron Attachment Studies.
- Surface Science, Molecular Beam Studies.
- UHV Temperature Programmed Desorption.
- High Performance RGA.
- Desorption / Outgassing studies / Bakeout cycles.
- Chamber / Process gas Contaminants

Hiden EPIC mass spectrometers for high precision scientific, process applications and UHV analysis of neutrals, radicals, and ions, featuring:

- High Sensitivity, Enhanced detection from 100% to 5ppb.
- Mass range options to 2500 amu, 6,9 or 12 mm pole diameter options.
- Enhanced long-term Stability (less than ±0.5% height variation over 24 h).
- Ion Energy distribution by mid-axis potential scanning ±100 V, 1000 eV Option.
- Ion source control for soft ionisation and appearance potential mass spectrometry.
- Enhanced sensitivity for high mass transmission, Automatic mass scale alignment.
- Pulse Ion Counter for continuous 7 decade dynamic range, Faraday option to 5x1010
- Enhanced contamination resistance via the RF-only pre-filter stage.
- Signal gating 1µs resolution for energy & mass distributions vs time or TOF studies.
- Temperature reading integrated into data displays for thermal desorption applications.
- Integral UHV compatible shroud, Liquid Nitrogen cooled shroud option.
- MASsoft control via RS232, RS485 or Ethernet LAN.
- Upgradeable to Plasma / SIMS specification.

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