Mo- and Cr-Doped WO3 Thin Films for Gas Sensing Applications
Andreea Popescu1,2, Ioan Valentin Tudose3,4, Octavian Narcis Ionescu1, Cosmin Romanitan1, Oana Brincoveanu1, Cristina Pachiu1, Raluca Gavrila1, Dumitru Manica1, Paul Schiopu2, Mirela Petruta Suchea1,3*, Emmanouel Koudoumas1*,3
1 National Institute for Research and Development in Microtechnologies - IMT Bucharest, 126A, Erou Iancu Nicolae Street, 077190, Voluntari-Bucharest, ROMANIA;
2 Doctoral School of Electronics, Telecommunications and Information Technology, National University of Science and Technology POLITEHNICA Bucharest, 061071, Bucharest, Romania;
3 Center of Materials Technology and Photonics, School of Engineering, Hellenic Mediterranean University, 71410 Heraklion, Crete, Greece;
4 Chemistry Department, University of Crete, Heraklion, Greece;
5 ”Petru Poni” Institute of Macromolecular Chemistry, Aleea Grigore Ghica Voda, 41A, Iaşi 700487, Romania
Abstract:
Pure or doped tungsten trioxide (WO3) seems to a promising material for gas sensing applications, due to its high sensitivity and excellent chemical stability. Mo-doped WO3 and Cr-doped WO3 thin films were successfully fabricated using the spray pyrolysis technique onto glass substrates and electrodes were deposited onto them, in order to configurate a gas sensing device. The films were characterised via X-ray diffraction (XRD), Scanning electron microscopy (SEM), Atomic Force Microscopy (AFM), Raman spectroscopy and UV-vis spectroscopy, to see doping-induced modifications in optical absorbance/transmittance and influence of doping on the electronic properties of the films. This work is ongoing with the goal to develop high-performance gas sensors for detecting hazardous gases such as NO2 and NH3.
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