Investigating the Effect of Molybdenum and Chromium Doping on WO3 Thin Films made by Spray-Pyrolysis

Andreea Popescu1,2, Ioan Valentin Tudose3,4, Petronela Pascariu5, Cosmin Romanitan1, Oana Brincoveanu1, Cristina Pachiu1, Raluca Gavrila1, Paul Schiopu2, Emmanouel Koudoumas1,3, Mirela Petruta Suchea1,3*

1 National Institute for Research and Development in Microtechnologies - IMT Bucharest, 126A, Erou Iancu Nicolae Street, 077190, Voluntari-Bucharest, ROMANIA;
2 Doctoral School of Electronics, Telecommunications and Information Technology, National University of Science and Technology POLITEHNICA Bucharest, 061071, Bucharest, Romania;
3 Center of Materials Technology and Photonics, School of Engineering, Hellenic Mediterranean University, 71410 Heraklion, Crete, Greece;
4 Chemistry Department, University of Crete, Heraklion, Greece;
5 “Petru Poni” Institute of Macromolecular Chemistry, Aleea Grigore Ghica Voda, 41A, Iaşi 700487, Romania



Tungsten trioxide (WO3) is a typical n-type gas-sensing material that has attracted considerable attention when it comes to the detection of various hazardous gases. This study investigates the properties of thin films fabricated by spray pyrolisis from molybdenum (Mo) or chromium (Cr) doped tungsten trioxide (WO3) at various dopant concentrations. The films were fabricated using a cost-effective and scalable spray pyrolysis technique. The effect of Mo and Cr dopants, introduced in different amounts was studied focusing on structural and surface properties that are the most important for the material's response to target gas molecules. The characterization of the fabricated thin films include analysis of their structural and morphological properties by SEM, AFM, XRD and Raman spectroscopy. The understanding gained from this study will be valuable for designing high-performance gas sensing devices for the detection of hazardous gases like NO2 and NH3.

Keywords: WO3; Gas sensing; Spray pyrolysis; Structural properties; Morphological properties.

Acknowledgments: IMT’s contribution was partially supported by the Romanian Ministry of Research, Innovation and Digitalisation through the μNanoEl, Cod: 23 07 core Programme and partially supported by PNRR/2022/C9/MCID/I8 CF23/14 11 2022 contract 760101/23.05.2023 financed by the Ministry of Research, Innovation and Digitalization in “Development of a program to attract highly specialized human resources from abroad in research, development, and innovation activities” within the – PNRR-IIIC9-2022 - I8 PNRR/2022/Component 9/investment 8.

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