NP2021-023 Sonochemical Passivation of Si and SiGe Heterostructures

Sonochemical Passivation of Si and SiGe Heterostructures

Аndriy Nadtochiy, Artem Podolian, Oleg Korotchenkov

Faculty of Physics, Taras Shevchenko National University of Kyiv, Kyiv 01601, Ukraine

To improve the carrier lifetime performance of Si and S

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