Precision motorized XY Table - Rotary Table LSMA-RTHMcombination positioning stages offer superior positioning performance in a very compact, low profile unit. They are ideal for space-critical optical, semiconductor, laser and vacuum applications. Constructed from a special lightweight machined aluminum alloy to provide high stiffness and long-term stability with linear ball bearings for low friction and superior motion smoothness. These precision actuators with micrometer-grade 0.5 mm pitch screws provides exceptional accuracy, repeatability, and ultra-fine positioning resolution. Stages can be driven by brushless servo or micro-stepped motor.
|Parameter / Axis||XY Table||Rotary Stage|
50 ... 200 mm
|resolution (*)||0.25 micron||3 arc-sec|
|max speed(*)||25 mm/sec||10 rpm|
|max load||10 Kg|
micro-stepper, DC servo, "Smart motor"
* - parameter dependent on the motor/encoder combination
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