Precision motorized XY Table - Rotary Table LSMA-RTHMcombination positioning stages offer superior positioning performance in a very compact, low profile unit. They are ideal for space-critical optical, semiconductor, laser and vacuum applications. Constructed from a special lightweight machined aluminum alloy to provide high stiffness and long-term stability with linear ball bearings for low friction and superior motion smoothness. These precision actuators with micrometer-grade 0.5 mm pitch screws provides exceptional accuracy, repeatability, and ultra-fine positioning resolution. Stages can be driven by brushless servo or micro-stepped motor.
Specifications:
Parameter / Axis | XY Table | Rotary Stage |
travel range | 50 ... 200 mm | 360 deg |
resolution (*) | 0.25 micron | 3 arc-sec |
max speed(*) | 25 mm/sec | 10 rpm |
max load | 10 Kg | |
axes | linear actuator LSMA-200 | rotary table RTHM-191 |
motor | micro-stepper, DC servo, "Smart motor" |
* - parameter dependent on the motor/encoder combination
For additional information visit IntelLiDrives web site
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