Precision motorized XY Table - Rotary Table LSMA-RTHMcombination positioning stages offer superior positioning performance in a very compact, low profile unit. They are ideal for space-critical optical, semiconductor, laser and vacuum applications. Constructed from a special lightweight machined aluminum alloy to provide high stiffness and long-term stability with linear ball bearings for low friction and superior motion smoothness. These precision actuators with micrometer-grade 0.5 mm pitch screws provides exceptional accuracy, repeatability, and ultra-fine positioning resolution. Stages can be driven by brushless servo or micro-stepped motor.

Specifications:

Parameter / Axis XY Table Rotary Stage
travel range

50 ... 200 mm

360 deg
resolution (*) 0.25 micron 3 arc-sec
max speed(*) 25 mm/sec 10 rpm
max load 10 Kg
axes

linear actuator

LSMA-200

rotary table

RTHM-191

motor

micro-stepper, DC servo, "Smart motor"

* - parameter dependent on the motor/encoder combination

For additional information visit IntelLiDrives web site

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