NanoAndMore presents NanoWorld AFM probes for ultra high speed scanning



The most often used standard probe for ultra-high speed scanning is the NanoWorld A R R O W ™ UHF

The Arrow™ UHF
(Ultra High Frequency) is a silicon SPM and AFM probe with a tetrahedral tip and a triangular cantilever capable of resonating with an ultra high frequency of up to
2.0 MHz. On request, specific cantilever thicknesses are selected within very narrow tolerances for
an extra selection fee.
The Arrow UHF is optionally also available wth a gold reflex coating.
For more developments for the emerging field of
high speed scanning please have a look below.
Cantilever 3D View
Cantilever 3D View
Cantilever Top View
Cantilever Top View
Tip Front View
Tip Front View
Tip Detail
Tip Detail

Support Chip 3D View
Support Chip 3D View

U l t r a - S h o r t - A F M - C a n t i l e v e r s

Next generation of AFM Probes for High Speed Scanning


  • development of very short, narrow and thin cantilevers with Electron Beam Deposited
    (EBD) tip for High Speed Scanning applications for present and future AFM systems
  • different cantilever materials are evaluated:
    Si (poly/single crystal/111), SiN, New Material ("NM")
  • joint development between NanoWorld AG and nanotools GmbH

Description of Ultra-Short-AFM-Cantilevers (USC) made of New Material


  • different prototypes of Ultra-Short cantilevers have been developed and
    fabricated resulting in different mechanical properties:

calculated values

Resonance Frequency [kHz] 5000 2000 1500 330 1300 1250 500
Force Constant [N/m] 30 3.0 0.6 0.3 1.2 7.8 0.75
CB length [m] 10 10 7 20 10 20 20
CB width [m] 5 5 3 10 5 10 10
CB thickness [nm] 680 280 100 190 190 680 280
Highlighted are the versions considered for commercialization in a first step


  • nanotools® High Dense Carbon (HDC) tip with the following dimensions:
    Height: > 2.0 m (typically 2.5
    Tip radius: < 10 nm
    Aspect ratio: approx. 1:5
    Tilt compensation: 8±1 deg

Support chip

  • dimensions of the Si support chip are very reproducible (1.6 mm x 3.4 mm)
  • etched and lowered corners of the Si support chip avoid contact
    between the Si support chip and the sample


  • 30 nm Gold reflex coating on both sides of the cantilevers (tip uncoated)


  • prototypes available (have been validated by external tests)
  • pre-production status: more than 50 wafers have been fabricated
  • ongoing beta testing

More information on

For more information you can visit

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Tags: AFM, SPM-week


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