We perfomed high resolution AFM measurements on GaN Quantum Dots
(QDs) with different AFM probes (FIG. 3 to Fig.S).
Because of their well defined dimensions (lateral as well as vertical) in the
nanometer scale and their high density on substrate QDs (FIG. 2) are an
ideal structure to benchmark AFM probes concerning their resolution at
FIG. 2: Schematic Structure of GaN Quantum Dots on AIN
Due to the tip radius of better than 5nm and
the excellent aspect ratio at the very end of
the tip every QD can be displayed exactly.
The reduced tip radius of about 25nm and
the worse aspect ratio at the end of the tip
do not allow a "true visualisation" of QDs.
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