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You will also need to consider a sputter coater for sample preparation which cost about 10K new but you may be able to find a company to donate an old one or buy one used.
If you are doing biological sample preparation on cells you will need a critical point dryer which I think costs $5K -$10K. This is a much longer lab that we do in our later nanobiotech classes. We do not currently do the Osmium steps of the process but it seems to work OK.
Carolyn