Authors: Nam Su Kwak, Jae Yeol Kim, Dae Gwang Park

Abstract: In this study, piezoelectric actuator, flexure guide, power transmission element and control method are considered for nanopositioning system apparatus. The main objectives of this thesis were to develop 2-axis nanostage which enables 2-axis control with the aid of piezoelectric actuator, and to improve the precision of the ultra-precision lathe (UP2) which is responsible for the ductile mode machining of the hardened-brittle material where the machining uses a the single-crystal diamond. Through simulation and experiments on ultra-precision positioning, stability and priority of the nanopositioning system with 2-axis nanostage and control algorithm are developed using Matlab/Simulink. Then the system, is applied to analyze surface morphology of the titanium alloy (Ti-6Al-4V)

Direct link: http://www.scientific.net/JNanoR.25.157