Tour of the Hiden SIMS Workstation, a UHV Surface Analysis System for Thin Film Depth Profiling

The Hiden SIMS Workstation is a stand-alone, general purpose, UHV SIMS/SNMS analysis system based around the MAXIM analyser. The instrument is both powerful and easy to use with a self-tuning secondary ion column and software controlled ion guns.

- Rapid turnaround of all types of samples
- Static and dynamic SIMS
- Integral ioniser for SNMS and RGA
- Choice of Ion guns
- SNMS surface mapping / imaging
- Surface contamination analysis
- Quantification of matrix level by SNMS
- Flexible and upgradeable configuration
- Low cost of ownership

The Hiden SIMS Workstation, an integrated UHV / SIMS facility for advanced surface analysis, featuring:

- Hiden MAXIM SIMS analyser operating under MASsoft for ppb analysis.
- Intergrated ioniser for efficient SNMS analysis.
- Choice of differentially pumped Hiden IG20 Gas, IG-5C Caesium, IFG200 FAB or high performance liquid gallium guns as primary excitation source.
- Integral ion gun raster control with signal gating for depth profiling.
- Electron flood gun option for charge neutralisation in insulator studies.
- Vacuum chamber bakeout heaters.
- Fast sample transfer, sample holder and manipulator with load lock.
- UHV manipulator for optimum sample positioning.
- SIMS elemental imaging option with ESM LabVIEW SIMS Imaging program.
- Static SIMS Spectral Library available.
- Automatic SIMS ion optics lens tuning, and automatic mass alignment for optimum SIMS performance.

For further information on this or other Hiden products please contact Hiden Analytical at or visit the main website at

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