Industrial Applications for The Hiden EQP System - Mass and Energy Analyser for Plasma Diagnostics

Complete energy resolved mass speciation and mass resolved energy analysis of all species in your plasma

- Positive ions, Negative Ions, Neutral Radicals and Neutrals analysis.
- Etching / Deposition Studies
- Ion implantation / Laser Ablation
- Residual Gas Analysis / Leak Detection
- Plasma electrode coupling - follow electrode conditions during operation.
- Analysis through a viewport, grounded electrode, driven electrode

The Hiden EQP is a combined Mass / Energy analyser for the analysis of positive AND negative ions, neutrals, and radicals from plasma processes, featuring:

- Software controlled Ion Extraction Optics for minimum plasma perturbation.
- 45° Electrostatic Sector analyser, Scan Energy at 0.05 eV increments/ 0.25eV FWHM.
- Minimum perturbation of ion flight path & constant ion transmission at all energies.
- Differentially pumped Triple filter Quadrupole, mass range options to 2500amu.
- High Sensitivity / Stability Pulse Ion Counting Detector with 7 decade dynamic range.
- Tuneable integral ioniser for appearance potential MS with electron attachment option.
- Penning Gauge and interlocks to provide over pressure protection.
- Signal gating and programmable signal gating option for time resolved studies in pulsed plasma.
- 1000eV Option, Floating option up to 10keV, Faraday Cup for high density plasmas.
- Mu-Metal, Radio-metal shielding options, high pressure operation option.
MASsoft control via RS232, RS485 or Ethernet LAN.

Presented by Mark Buckley. With thanks to who filmed the video.

Views: 46


You need to be a member of The International NanoScience Community to add comments!

Join The International NanoScience Community

Welcome - about us

Welcome! Nanopaprika was cooked up by Hungarian chemistry PhD student in 2007. The main idea was to create something more personal than the other nano networks already on the Internet. Community is open to everyone from post-doctorial researchers and professors to students everywhere.

There is only one important assumption: you have to be interested in nano!

Nanopaprika is always looking for new partners, if you have any idea, contact me at

Dr. András Paszternák, founder of Nanopaprika

Publications by A. Paszternák:

Smartphone-Based Extension of the Curcumin/Cellophane pH Sensing Method

Pd/Ni Synergestic Activity for Hydrogen Oxidation Reaction in Alkaline Conditions

The potential use of cellophane test strips for the quick determination of food colours

pH and CO2 Sensing by Curcumin-Coloured Cellophane Test Strip

Polymeric Honeycombs Decorated by Nickel Nanoparticles

Directed Deposition of Nickel Nanoparticles Using Self-Assembled Organic Template,

Organometallic deposition of ultrasmooth nanoscale Ni film,

Zigzag-shaped nickel nanowires via organometallic template-free route

Surface analytical characterization of passive iron surface modified by alkyl-phosphonic acid layers

Atomic Force Microscopy Studies of Alkyl-Phosphonate SAMs on Mica

Amorphous iron formation due to low energy heavy ion implantation in evaporated 57Fe thin films

Surface modification of passive iron by alkylphosphonic acid layers

Formation and structure of alkylphosphonic acid layers on passive iron

Structure of the nonionic surfactant triethoxy monooctylether C8E3 adsorbed at the free water surface, as seen from surface tension measurements and Monte Carlo simulations

Next partner events of TINC

We are Media Partner of: