Sputtering of soft magnetic materials

Posted by TINC on February 3, 2011 at 8:17pm

I would like to introduce our new approach for Sputtering of soft magnetic materials, to form Nanoparticals of magnetic materials covered by Ferrite model TFSP 840. The system is a loadlock sputtering system which includes UV pre cleaning as well as surface activation, with possible UV enhanced oxidation of sputtered layers, all done safely in the loadlock.

Main features:

Three 3” magnetron high magnetic field sources

RF and DC pulsed power supply

Cryo pumped with base pressure in 10E-8 torr range

3 gases with MFC

Reactive co-sputtering

250C substrate heater, 4”

Z-movement of substrate during deposition with adjustable high and low setpoints for uniformity and layer improved structure

Please let me know if it looks good for publishing and if anyone is interested for more details

Best regards,
Angel Hershko

Vacuum Systems Technologies & Services Ltd.

Vice President
www.vacuumltd.com