PhD position – 3D chemical characterization of nanotechnoly devices by analytical electron tomography

Progress in micro and nanotechnology strongly relies on the development of sophisticated structural and analytical tools. The Nano-Characterization Platform of CEA-LETI comprises several state-of-the-art transmission electron microscopes (TEM) dedicated to sub-atomic imaging and spectral analysis. This thesis aims at the development of analytical electron tomography, which is the 3D extension of analytical electron microscopy. The first task will be to automate the tilting of the stage and the acquisition of spectrum images. The candidate will then explore various tomographic reconstruction algorithms, in collaboration with the department of Applied Mathematics and Theoretical Physics, University of Cambridge, UK. Finally, different experimental conditions and tools for absorption correction will be tested with the aim to achieve fully quantitative chemical analysis. The implementation of these techniques will be validated on samples with known structure and composition, and applied to nanotechnology devices provided by industrial partners of CEA-LETI.

SL-DRT-16-0110

LOCATION

Département Technologies Silicium (LETI)
Service Caractérisation des Matériaux et Composants
Autre laboratoire
Centre : Grenoble
Date souhaitée pour le début de la thèse : 01-09-2016

CONTACT PERSON

Zineb SAGHI
CEA
DRT/DTSI/SCMC/Autre
Commissariat à l’énergie atomique et aux énergies alternatives

MINATEC Campus | 17 rue des martyrs | F-38054 Grenoble Cedex
Téléphone : 0438784870
Email : zineb.saghi@cea.fr

UNIVERSITY / GRADUATE SCHOOL

INSA Lyon
Ecole Doctorale Matériaux de Lyon

THESIS SUPERVISOR

Thierry EPICIER
MATEIS
Bâtiment Blaise Pascal – 7, avenue Jean Capelle

69621 Villeurbanne

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