Nano and Microfabrication Study Activity

In the fourth semester microfabrication course we get into more advanced semiconductor processing. We are having an exam on Friday so we had a study session on Wednesday. For the study session I divided the class of nine students into four groups and assigned each group some example problems similar to what would be on the test. It took them about an hour to work through the problems as I went around to each group and helped them. I then had them write the problems on a giant piece of paper and present their results to the class.In the past I would have just worked through a series of example problems in front of the class. With this method there was a great deal more student involvement, there were no bored or yawning students and there was active participation from pretty much all students. At the end we were able to take digital photographs of the solutions. I left the problems taped to the wall for all to see.

This also should give you an idea of the type of material covered in our fourth semester classes. We are using "Fabrication Engineering at the Micro and Nanoscale" by Stephen Campbell for the primary textbook for this class. The topics that will be on the midterm are:1. Thermal Oxidation of Silicon2. Ion Implantation3. Diffusion4. PhotoFor a point of comparison in my second semester class we are making CMOS sandwiches.
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