3439921797?profile=originalPiezoresponse Force Microscopy Study of Ferroelectric BaTiO3 Thin Film Directly Deposited on Si(001) by Magnetron Sputtering

Authors: Hong Liang Lu, Shuang Qi Song, Xiao Feng Gu, Shu Li He, Chong Lin Chen, Gang Bing Song, Zhong Hou Cai, Hai Ming Guo, Hong Jun Gao, Li Sun

 

Abstract: Direct integration of ferroelectrics with semiconductors is critical to lower the cost and simplify the production procedures for data storage/processing components and miniature sensor/actuator development. By optimizing magnetron sputtering parameters, highly <001> preferential growth of BaTiO3 thin films with reproducible ferroelectric responses have been achieved on Si(001) substrates. The thin film ferroelectric characteristics were systematically studied by piezoresponse force microscopy, and a piezoelectric coefficient d33 of 24pm/V has been measured. It is found that the scanning tip sidewall angle and cantilever tilt affect the contour and size of polarized area.

 

Direct link: http://www.scientific.net/JNanoR.22.23

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