Effect of Temperature and Carbon Contents on the Synthesis of β-SiC Powder

Authors: J.Y. Won, Soo Ryong Kim, Y.J. Lee, Tae Gyung Ko, Young Hee Kim, Woo Teck Kwon

Abstract: Uniform nano sized b-SiC powders have been prepared in a flow reactor by thermal pyrolysis using organometallic precursors with different C/Si mole ratios such as methyltrichlorosilane and triphenylsilane. The temperature was varied from 1200°C to 1400°C. In order to examine the pyrolysis residue after the reaction, the sample was collected and analyzed with XRD, Raman and TEM. The X-ray diffraction result of the pyrolysis residue shows that the diffraction peaks around 35°, 60°, and 73° correspond to the beta SiC phase. All the diffraction peaks were quite broad, which indicated that the SiC powder was in the early stage of crystallization at this heat treatment temperature.

Direct link: http://www.scientific.net/JNanoR.21.83