RGA Series Applications:

- Vacuum diagnostics

- Leak detection

- Contamination analysis

- Semiconductor production

- Vacuum process analysis

- Reactive sputtering closed loop control

- Vacuum furnace monitoring

- Molecular beam studies

- UHV/XHV surface science

- UHV TPD

Core Features:

• High sensitivity helium leak detection, mass selectable for alternative search gases

• Ultra-fast data acquisition - up to 500 measurements per second

• Advanced analysis capability for complex gas interpretation

• Data presentation as mass peak ratios for highest stability and accuracy

• Twin burnout-resistant oxide coated iridium filaments

• User-programmable multi-tasking firmware for creation of process-specific control and data acquisition functions

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