Residual Gas Analysers for Vacuum Diagnostics and Leak Detection

Residual Gas Analysers for Vacuum Diagnostics and Leak Detection

RGA Series Applications:
- Vacuum diagnostics
- Leak detection
- Contamination analysis
- Semiconductor production
- Vacuum process analysis
- Reactive sputtering closed loop control
- Vacuum furnace monitoring
- Molecular beam studies
- UHV/XHV surface science
- UHV TPD

Core Features:
• High sensitivity helium leak detection, mass selectable for alternative search gases
• Ultra-fast data acquisition - up to 500 measurements per second
• Advanced analysis capability for complex gas interpretation
• Data presentation as mass peak ratios for highest stability and accuracy
• Twin burnout-resistant oxide coated iridium filaments
• User-programmable multi-tasking firmware for creation of process-specific control and data acquisition functions

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