Langmuir probe for measurment of the electrical properties of plasma.
- Plasma Potential
- Floating Potential
- Electron Temperature
- Electron Density
- Ion Density
- Electron Energy Distribution
Routine monitoring of the I-V plasma characteristic by the Hiden ESPION Probe gives direct information relating to plasma stability and reproducibility. Automatic real-time extrapolation of plasma parameters gives detailed information on plasma properties for use in characterisation and uniformity monitoring.
ESPion Langmuir probes measure:
• ion and electron density over the range 1014 - 1019 m-3
• electron temperature up to 10eV
• EEDF
• plasma potential
• floating potential
• Debye length
The ESPion system employs Orbital motion Limited (OML) and Allen Boyd Reynolds (ABR) as standard plasma analysis models.
The Hiden automatic z drive provides for spatially resolved measurements across the plasma volume. The standard z drive translation options are: 300, 600 and 900mm.
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